Characterization of ultra high vacuum system (-by gas accumulation and SRG methods)
This thesis evaluates the concept of characterization process of ultra-high vacuum system, known as SEA5 Serial Expansion Apparatus at RISE Research Institutes of Sweden. To produce precisely known pressures in the medium, high, and ultra-high vacuum range for gauge calibrations, the volume expansion system is often used for that purpose. There are different methods to determine the volume or the