Nanoimprint Lithography Based Nanoelectromechanical Device Fabrication
This thesis presents studies concerning the development of nanoimprint lithography technology, nanoimprint lithography-based nanofabrication, as well as the production of NEMS devices and their characterization. It can be divided into the following parts: The first part introduces different NIL stamp fabricating methods and processes. The top-down fabricating methods, such as E-beam lithography an
