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Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences

This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography (NIL), a relatively new nanofabrication tool capable of high resolution and high throughput. Surface structure creation with NIL is based on mechanical deformation of the patterning material. This is radically different from the two main established methods, ultra violet lithography (UVL) and elect