From InGaN pyramids to micro-LEDs characterized by cathodoluminescence
We present a study of the optical properties of various steps in the process of fabricating micro light-emitting diodes (μ-LEDs) based on quantum wells embedded in micron-sized InGaN platelets. In this study, we focus on structures for red emission, but the technology is equally suitable for the less technologically challenging blue and green emitting μ-LEDs. The starting point is growth of an InG
