Design Software
Slide 1 Claes Thelander Solid State Physics & NanoLund Lund University, Sweden EBL pattern design for randomly placed nanostructures Nanostructures prepared here ...characterized here Si (p++) SiO2 A V Background How can we make this process • fast & flexible, • accurate, • reproducible..? Challenges: • Each nanostructure often unique. • Internal structure with small features. • Transfer is mostly
https://www.nano.lu.se/sites/nano.lu.se/files/2022-11/Design%20software.pdf - 2026-05-07
