Effect of Gate Voltage Stress on InGaAs MOSFET with HfO2 or Al2O3 Dielectric
InGaAs nMOSFETs with Al2O3 and HfO2 as dielectric are analyzed. The devices with Al 2O3 show a slightly better subthreshold slope. Both high-κ's have an equal transconductance frequency dispersion (gm-f). A reduction of gm-f is reached by scaling the HfO2 thickness. Positive gate stress leads to an increase in threshold voltage and subthreshold slope for all oxides. DC-gmax degradation is related