No title
The programs are made to decide testing points in an integrated circuit. The measurements on the IC are performed in a SEM using digital electronbeamdeflection and digital secondary-electrondetection. A PDP11/23 computer and a QRGB-256 video-interface are used. Programs are written in MACRO-assembler and FORTRAN. Pictures may be taken up and stored on a mass storage (floppy-disk) for later retriev
