High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technology with low melting temperature (280 °C) metal alloy foils and silicon etched templates. A gold-tin alloy (80 wt% Au/20 wt% Sn) was used to cast micro-gratings with pitch sizes in the range of 2 to20 μm and depth of the
