Calibration factor for determination of interstitial oxygen concentration in germanium by infrared absorption
Intensities of infrared absorption due to asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry (SIMS). For Ge samples with oxygen content less than 510(17) cm(-3) a good correlation has been found between the values of oxygen concentratio