X-ray scattering and diffraction from ion beam induced ripples in crystalline silicon
We report on periodic ripple formation on Si(001) surfaces after bombardment with Xe+ ions with energies between 5 and 35 keV under incidence angles of 65° and 70°. The sputter process leads to the formation of a rippled amorphous surface layer, followed by a rippled interface toward crystalline material. Using grazing-incidence small-angle scattering and diffraction, we show that the surface morp
